Pad removal device and method

ABSTRACT

A pad removal device includes a pad guide extending along a first direction. The pad guide includes a first affixing component configured to affix a first end of the pad guide to a pad at a first pad edge location, and a second affixing component configured to affix a second end of the pad guide to the pad at a second pad edge location opposite the first pad edge location. The pad removal device further includes an actuator attached to the pad guide, and a control assembly coupled to the actuator and configured to cause the actuator to move the first end toward the second end along the first direction. The pad guide is configured to extend in a second direction different from the first direction by an amount dependent on a distance between the first end and the second end.

PRIORITY CLAIM

The present application is a continuation of U.S. application Ser. No.15/488,958, filed Apr. 17, 2017, which is incorporated herein byreference in its entirety.

BACKGROUND

Integrated circuit (IC) manufacturing often includes chemical mechanicalplanarization (CMP) processing operations in which chemical slurries andpolish heads are applied to IC wafers. To facilitate control of movementand pressure during such operations, a wafer is typically supported by aCMP pad bonded to a platen. After a CMP pad reaches its useful lifetime,it is separated from the platen and replaced.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A-1E are diagrams of one or more pad removal devices, inaccordance with some embodiments.

FIGS. 2A-2C are diagrams of a pad guide, in accordance with someembodiments.

FIGS. 3A-3C are diagrams of a pad guide, in accordance with someembodiments.

FIG. 4 is a schematic diagram of a telescoping arm, in accordance withsome embodiments.

FIG. 5 is a schematic diagram of an actuating assembly, in accordancewith some embodiments.

FIG. 6 is a schematic diagram of an actuating assembly, in accordancewith some embodiments.

FIG. 7 is a flowchart of a method of removing a pad, in accordance withsome embodiments.

FIG. 8 is a schematic view of a system for controlling a pad removaldevice, in accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components, values, operations, materials,arrangements, or the like, are described below to simplify the presentdisclosure. These are, of course, merely examples and are not intendedto be limiting. Other components, values, operations, materials,arrangements, or the like, are contemplated. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

In various embodiments, a pad removal device includes a pad guide havinga first end and a second end along a first direction, at least oneactuator attached to the first end, and a control assembly mechanicallycoupled to the actuator. The control assembly causes the actuator topull the first end toward the second end along the first direction suchthat the first end moves toward the second end, and the pad guide isconfigured to extend in a second direction perpendicular to the firstdirection by an amount dependent on a distance between the first end andthe second end. By affixing the first and second ends of the pad guideto pad edges, the pad edges are pulled in a direction away from a padcenter location, thereby separating the pad from a surface to which itis bonded.

FIGS. 1A and 1B are diagrams of a pad removal device 100, in accordancewith some embodiments. FIG. 1A is a diagram based on a side view of padremoval device 100 at a first position setting, and FIG. 1B is a diagrambased on the side view of pad removal device 100 at a second positionsetting. In addition to pad removal device 100, FIGS. 1A and 1B depict apad 140, a surface 150, a direction X, and a direction Z, perpendicularto direction X.

Pad removal device 100 includes a pad guide 110, actuators 120, and acontrol assembly 130. Pad guide 110 includes a first end 112 and asecond end 114. A first actuator 120 extends from control assembly 130to first end 112, and a second actuator 120 extends from controlassembly 130 to second end 114.

In some embodiments, pad removal device 100 includes a single actuator120 and one of actuators 120 is replaced by a support element (notshown). In some embodiments, pad removal device 100 includes a singleactuator 120 and control assembly 130 is directly coupled to one offirst end 112 or second end 114.

In some embodiments, pad removal device 100 includes one or more padguides (not shown) in addition to pad guide 110. In some embodiments,pad removal device 100 includes one or more actuators (not shown) inaddition to a first actuator 120 extending from control assembly 130 tofirst end 112 and a second actuator 120 extending from control assembly130 to second end 114.

Pad guide 110 includes an affixing component 116 at first end 112, anaffixing component 116 at second end 114, and a lower surface 118. Asdiscussed below, affixing components 116 are configured to temporarilyaffix pad guide 110 to edges of pad 140.

In operation, with pad removal device 100 positioned on top of pad 140,at least a portion of lower surface 118 contacts an upper surface 149 ofpad 140 for one or more position settings of pad removal device 100. Asdepicted in FIGS. 1A and 1B, at least a center portion of pad 140 isbonded to surface 150. In some embodiments, pad 140 is a CMP polishingpad. In some embodiments, surface 150 is a surface of a platen of a CMPprocessing system.

At the first position setting depicted in FIG. 1A, first end 112 andsecond end 114 define a distance D1 along direction X. Distance D1corresponds to pad guide 110 being in a non-actuated state such thatlower surface 118 aligns along direction X and does not have asignificant component along direction Z.

At the second position setting depicted in FIG. 1B, first end 112 andsecond end 114 define a distance D2 along direction X. Distance D2 isless than distance D1 and corresponds to pad guide 110 being in anactuated state. In the actuated state, lower surface 118 deviates fromalignment along direction X such that a significant component, distanceD3, exists along direction Z. Distance D3 is defined by the displacementalong direction Z of the lowermost portion of lower surface 118 from itsnon-actuated position to its actuated position in response to first end112 and second end 114 being moved toward each other along direction X.Reduction of the distance between first and second ends 112, 114 causespad guide 110 to bend or flex.

Pad guide 110 is a mechanical component or assembly capable oftranslating the displacement of first end 112 and second end 114 alongdirection X into the displacement of lower surface 118 along directionZ. Displacement of first end 112 and second end 114 along direction Xincludes displacement having a component in a direction in addition todirection X. The amount of the displacement of lower surface 118 alongdirection Z is dependent on the distance between first end 112 andsecond end 114. As the distance between first end 112 and second end 114decreases, the amount of the displacement of lower surface 118 alongdirection Z increases.

In some embodiments, first end 112 and second end 114 are aligned abovea longitudinal axis (not shown) of pad guide 110 so that, in operation,the displacement of lower surface 118 along direction Z is away fromactuators 120 and control assembly 130. In some embodiments, a proximityof pad guide 110 to one or both of control assembly 130 and/or actuator120 causes the displacement of lower surface 118 along direction Z to beaway from actuators 120 and control assembly 130, in operation. In someembodiments, pad guide 110 is configured so that the displacement oflower surface 118 along direction Z is greatest at a center of lowersurface 118.

By the configuration described above, in operation, pad guide 110responds to decreasing separation between first end 112 and second end114 along direction X by increasing a distance along direction Z betweena center of pad 140 and edges of pad 140 at locations corresponding toaffixing components 116. In operation, because pad 140 is initiallybonded to surface 150, pad guide 110 acts to pull each of the pad edgelocations away from a center pad region along direction Z in response tofirst end 112 being moved toward second end 114 along direction X and/orsecond end 114 being moved toward first end 112 along direction X.

Pad guide 110 includes a material having sufficient strength andstiffness to exert a force in direction Z capable of overcoming thebonding strength between pad 140 and surface 150. In variousembodiments, pad guide 110 includes one or more of a metal such asstainless steel, a plastic such as polyetheretherketone (PEEK), oranother sufficiently strong and stiff material. In some embodiments, padguide 110 includes a material having one or more features ofanti-corrosion, anti-deformation, or a non-stick surface.

In some embodiments, pad guide 110 includes a plurality of hinged platesegments such as pad guide 210, discussed below with respect to FIGS.2A-2C. In some embodiments, pad guide 110 includes an elastic plate suchas pad guide 310, discussed below with respect to FIGS. 3A-3C.

Each of first end 112 and second end 114 is a terminal portion of padguide 110. In some embodiments, one or both of first end 112 or secondend 114 includes affixing component 116. In some embodiments, affixingcomponent 116 is a separate component or assembly attached to first end112 and/or second end 114.

Each of first end 112 and second end 114 is configured to mechanicallycouple pad guide 110 to another component of pad removal device 100 suchas actuator 120. In some embodiments, one or both of first end 112 orsecond end 114 is configured to removably couple pad guide 110 toanother component of pad removal device 100. In some embodiments, one orboth of first end 112 or second end 114 is configured to couple padguide 110 to another component of pad removal device 100 on a continuedbasis, such as for a lifetime of pad guide 110 or actuator 120. Invarious embodiments, each of first end 112 and second end 114 includesone or more of a pin, a hook, a fastening device, an opening, or anotherconfiguration capable of mechanically coupling pad guide 110 to anothercomponent of pad removal device 100.

Affixing component 116 is a mechanical component or assembly capable ofaffixing first end 112 or second end 114 to an edge of pad 140 whileexerting a force in direction Z capable of overcoming a bonding strengthbetween pad 140 and surface 150.

In some embodiments, affixing component 116 is configured to temporarilyaffix first end 112 or second end 114 to an edge of pad 140. In someembodiments, affixing component 116 includes a clipper having a pair ofarms and a spring such that, in operation, the arms are held in place onopposite sides of a pad edge by a force exerted by the spring. In someembodiments, affixing component 116 includes more than one clipper.

In some embodiments, affixing component 116 includes a clamping deviceor another component or assembly capable of gripping pad 140 so as totemporarily affix first end 112 or second end 114 to an edge of pad 140.In some embodiments, affixing component 116 includes a hook, needle, oranother component or assembly capable of piercing pad 140 so as totemporarily affix first end 112 or second end 114 to an edge of pad 140.

In some embodiments, affixing component 116 is configured to beremovable from pad guide 110 and to permanently affix first end 112 orsecond end 114 to an edge of pad 140. In some embodiments, affixingcomponent 116 includes an adhesive device, a needle, or anothercomponent or assembly capable of permanently affixing a first end 112 orsecond end 114 to an edge of pad 140.

In the embodiment depicted in FIGS. 1A-1B, pad guide 110 includes twoends, first end 112 and second end 114. In some embodiments, such as theembodiment depicted in FIG. 1D, pad guide 110 includes ends in additionto first end 112 and second end 114.

Actuator 120 is a mechanical component or assembly capable of applying aforce sufficient to pull, and thereby move, first end 112 toward secondend 114 along direction X and/or second end 114 toward first end 112along direction X responsive to control assembly 130. In variousembodiments, actuator 120 includes one or more of a telescopingassembly, a wire, a moveable stage, a threaded or grooved arm, oranother component or assembly capable of applying a force to first end112 or second end 114.

In some embodiments, actuator 120 includes a telescoping arm such as atelescoping arm 420, discussed below with respect to FIG. 4. In someembodiments, actuator 120 includes a wire such as a wire 520, discussedbelow with respect to actuating assembly 500 and FIG. 5. In someembodiments, actuator 120 includes a moveable stage such as a moveablestage 620, discussed below with respect to actuating assembly 600 andFIG. 6.

Actuator 120 is configured to be coupled to control assembly 130 so asto respond to control assembly 130 by applying a force to first end 112sufficient to pull, and thereby move, first end 112 toward second end114 along direction X and/or applying a force to second end 114sufficient to pull, and thereby move, second end 114 toward first end112 along direction X. In some embodiments, actuator 120 is configuredto be mechanically coupled to control assembly 130. In some embodiments,actuator 120 is configured to be electrically or communicatively coupledto control assembly 130. In some embodiments, actuator 120 is configuredto respond to voltage levels or other signals from control assembly 130.

In some embodiments, actuator 120 includes a telescoping arm configuredto respond to a screw or threaded device. In some embodiments, actuator120 includes a telescoping arm configured to respond to a pneumaticdevice. In some embodiments, actuator 120 includes a wire configured torespond to a winding device. In some embodiments, actuator 120 includesa moveable stage configured to respond to a tracking device.

Actuator 120 is configured to be mechanically coupled to first end 112and/or second end 114. In some embodiments, actuator 120 is configuredto be removably coupled to first end 112 or second end 114. In someembodiments, actuator 120 is configured to be coupled to first end 112or second end 114 on a continual basis, such as for a lifetime of padguide 110 or actuator 120. In various embodiments, actuator 120 includesone or more of a pin, a hook, a fastening device, an opening, or anotherconfiguration capable of mechanically coupling to first end 112 orsecond end 114.

Control assembly 130 is a mechanical or electro-mechanical assemblycapable of controlling actuator 120. In some embodiments, controlassembly is capable of supporting actuator 120. In some embodiments,actuator 120 is supported by a component or assembly (not shown) otherthan control assembly. In some embodiments, control assembly 130 isconfigured to generate and/or output voltage levels or other signals toactuator 120. Control assembly 130 includes a user interface 132 and acarrier 134.

Control assembly 130 is configured to be mechanically coupled toactuator 120 so that at least a portion of actuator 120 has a fixedposition relative to control assembly 130. In some embodiments, actuator120 is a telescoping arm and control assembly 130 includes mountinghardware configured to fix a position of at least one section of thetelescoping arm relative to control assembly 130. In some embodiments,actuator 120 is a wire and control assembly 130 includes a windingdevice configured to fix a position of at least a portion of the wirerelative to control assembly 130. In some embodiments, actuator 120 is amoveable stage and control assembly 130 includes a tracking deviceconfigured to fix a position of the moveable stage relative to controlassembly 130.

Control assembly 130 is configured to cause a first actuator 120 to pullfirst end 112 toward second end 114 along direction X and simultaneouslycause a second actuator 120, if present, to pull second end 114 towardfirst end 112 along direction X. In some embodiments, control assembly130 includes a screw device configured to control a length of atelescoping arm. In some embodiments, control assembly 130 includes apneumatic device configured to control a length of a telescoping arm.

In some embodiments, control assembly 130 includes a winding deviceconfigured to control a length of a wire extending from the windingdevice. In some embodiments, control assembly 130 includes a windingdevice configured to control lengths of a plurality of wires extendingfrom the winding device.

In some embodiments, control assembly 130 includes a tracking deviceconfigured to control a positioning of a moveable stage. In someembodiments, control assembly 130 includes a tracking device configuredto control positioning of a plurality of moveable stages.

In some embodiments, control assembly 130 is configured to be directlymechanically coupled to one of first end 112 or second end 114. In someembodiments, control assembly 130 is configured to be mechanicallycoupled to a support element that is mechanically coupled to one offirst end 112 or second end 114.

Control assembly 130 is configured to control a speed at which actuator120 moves first end 112 and/or second end 114 along direction X. Bycontrolling the speed at which actuator 120 moves first end 112 and/orsecond end 114 along direction X, control assembly 130, in operation,controls a speed at which pad guide 110 pulls pad edge locations awayfrom the center pad region, and thereby the rate at which pad 140 isseparated from surface 150.

In some embodiments, control assembly 130 is configured to control adirection and a rate at which at least one screw turns to effectmechanical control of actuator 120. In some embodiments, controlassembly 130 is configured to control a direction and a rate at whichair is moved to effect pneumatic control of actuator 120. In someembodiments, control assembly 130 is configured to control a directionand a rate at which at least one winding device turns to effectmechanical control of actuator 120. In some embodiments, controlassembly 130 is configured to control a direction and a rate at which atleast one tracking device moves to effect mechanical control of actuator120.

In some embodiments, control assembly 130 includes a processor or otherlogic device capable of controlling the speed at which actuator 120moves first end 112 and/or second end 114 along direction X. In someembodiments, control assembly 130 is configured to increase a rate atwhich actuator 120 moves first end 112 and/or second end 114 alongdirection X as the distance between first end 112 and second end 114decreases.

In some embodiments, control assembly 130 is configured to control thespeed at which actuator 120 moves first end 112 and/or second end 114along direction X based on one or more predetermined values. In someembodiments, control assembly 130 is configured to control the speed atwhich actuator 120 moves first end 112 and/or second end 114 alongdirection X based on one or more values received as input from anexternal source.

User interface 132 is a mechanical, electrical, or electro-mechanicalassembly capable of receiving input from a user and communicating theinput with control assembly 130. In some embodiments, user interface 132is configured to receive input directly from a user. In someembodiments, user interface 132 is configured to receive input in theform of electrical signals transmitted by one or more wires or wirelessdevices.

In various embodiments, user interface 132 includes one or more of aswitch, a variable-speed controller, a connector, a plug, a receptacle,a wireless interface, or another assembly capable of receiving andcommunicating user input. In various embodiments, user input includesone or more indications of one or more of an on-off status, an actuationstatus, an actuation direction, a speed value or values, or anotherindication related to control of pad removal device 100.

Carrier 134 is a mechanical component or assembly configured to beusable to maintain control assembly 130 in one or more positions abovesurface 150. In some embodiments, carrier 134 is a handle configured tobe gripped by a human operator of pad removal device 100. In someembodiments, carrier 134 is an interface configured to mechanicallycouple pad removal device 100 to an external mechanical component orassembly.

FIGS. 1C-1E are schematic diagrams of a top view of one or more padremoval devices 100, in accordance with some embodiments. FIGS. 1C-1Einclude one or more pad removal devices 100 and pad 140, discussed abovewith respect to FIGS. 1A-1B. In addition to one or more pad removaldevices 100 and pad 140, FIGS. 1C-1E depict direction X, discussed abovewith respect to FIGS. 1A-1B, and a direction Y, perpendicular todirections X and Z.

In the embodiment depicted in FIG. 1C, a single pad removal device 100is positioned across pad 140 and overlies a pad center region 141. Firstend 112 is affixed to pad 140 at a pad edge location 142, and second end114 is affixed to pad 140 at a pad edge location 143.

In the embodiment depicted in FIG. 1D, a single pad removal device 100including four actuators 120 is positioned across pad 140 and overliespad center region 141. First end 112 is affixed to pad 140 at pad edgelocation 142, second end 114 is affixed to pad 140 at pad edge location143, a third end 111 is affixed to pad 140 at a pad edge location 144,and a fourth end 113 is affixed to pad 140 at a pad edge location 145.

In the embodiment depicted in FIG. 1E, two pad removal devices 100 arepositioned across pad 140. Each pad removal device 100 overlies padcenter region 141. First end 112 of a first one of the two pad removaldevices 100 is affixed to pad 140 at pad edge location 142, and secondend 114 of the first one of the two pad removal devices 100 is affixedto pad 140 at pad edge location 143. First end 112 of a second one ofthe two pad removal devices 100 is affixed to pad 140 at a pad edgelocation 146, and second end 114 of the second one of the two padremoval devices 100 is affixed to pad 140 at a pad edge location 147. Insome embodiments, more than two pad removal devices 100 are positionedacross pad 140.

By the configuration described above, in operation, pad removal device100 is usable to overcome the bonding strength between pad 140 andsurface 150 more easily than with other devices that do not have theconfiguration of pad removal device 100. Pad removal device 100 therebyfacilitates the removal of a pad from a surface, for example the removalof a CMP pad from the top surface of a platen. Compared to otherapproaches, pad removal device 100 enables easier and faster removal ofa pad that is bonded to a surface.

FIGS. 2A-2C are diagrams of a pad guide 210, in accordance with someembodiments. Pad guide 210 is usable as part or all of pad guide 110,discussed above with respect to pad removal device 100 and FIGS. 1A-1E.

FIG. 2A is a diagram based on a side view of pad guide 210 at a firstposition setting, FIG. 2B is a diagram based on the side view of padguide 210 at a second position setting, and FIG. 2C is a top view of padguide 210 at the first position setting. In addition to pad guide 210,FIGS. 2A-2C depict directions X, Y, and Z as discussed above withrespect to FIGS. 1A-1E.

Pad guide 210 includes a plurality of plate segments 212 joined by acorresponding plurality of hinges 214. At the first position settingdepicted in FIG. 2A, pad guide 210 is in a non-actuated state in whichit extends distance D1 along direction X and does not have a significantcomponent along direction Z. At the second position setting depicted inFIG. 2B, pad guide 210 is in an actuated state in which it extendsdistance D2 along direction X and distance D3 along direction Z.

Plurality of plate segments 212 and plurality of hinges 214 areconfigured so that, in operation, the decrease from distance D1 todistance D2 along direction X causes pad guide 210 to extend to distanceD3 along direction Z based on at least one segment of plurality of platesegments 212 rotating about a corresponding hinge of plurality of hinges214 relative to a second segment of plurality of plate segments 212.

In the embodiment depicted in FIGS. 2A and 2B, plurality of platesegments 212 has five hinged plate segments. In some embodiments,plurality of plate segments 212 has fewer than five segments. In someembodiments, plurality of plate segments 212 has more than fivesegments.

In the embodiment depicted in FIG. 2C, a middle segment of a pluralityof plate segments 212 is wider along direction Y than the other segmentsof the plurality of plate segments 212, and the endmost segments ofplurality of plate segments 212 are narrower along direction Y than theother segments of plurality of plate segments 212. In some embodiments,the segments of plurality of plate segments 212 have width relationshipsother than those of the embodiment depicted in FIG. 2C. In someembodiments, each segment of plurality of plate segments 212 has as asame width along direction Y.

Pad guide 210 includes one or more components or assemblies (not shown)at one or both ends configured to mechanically couple pad guide 210 toother components of a pad removal device such as pad removal device 100,discussed above with respect to FIGS. 1A-1E.

By the configuration described above, pad guide 210 is capable oftranslating the movement of first end 112 and second end 114 toward eachother in direction X into movement along direction Z such that thebenefits described above with respect to pad removal device 100 can berealized.

FIGS. 3A-3C are diagrams of a pad guide 310, in accordance with someembodiments. Pad guide 310 is usable as part or all of pad guide 110,discussed above with respect to pad removal device 100 and FIGS. 1A-1E.

FIG. 3A is a diagram based on a side view of pad guide 310 at a firstposition setting, FIG. 3B is a diagram based on the side view of padguide 310 at a second position setting, and FIG. 3C is a top view of padguide 310 at the first position setting. In addition to pad guide 310,FIGS. 3A-3C depict directions X, Y, and Z, discussed above with respectto FIGS. 1A-1E.

Pad guide 310 is a single elastic plate. At the first position settingdepicted in FIG. 3A, pad guide 310 is in a non-actuated state in whichit extends distance D1 along direction X and does not have a significantcomponent along direction Z. At the second position setting depicted inFIG. 3B, pad guide 310 is in an actuated state in which it extendsdistance D2 along direction X and distance D3 along direction Z.

Pad guide 310 is configured so that, in operation, the decrease fromdistance D1 to distance D2 along direction X causes pad guide 310 toextend to distance D3 along direction Z based on a combination ofelasticity and stiffness.

In the embodiment depicted in FIG. 3C, a middle portion of plurality ofpad guide 310 is wider along direction Y than the other portions of padguide 310, and the endmost portions of pad guide 310 are narrower alongdirection Y than the other portions of pad guide 310. In someembodiments, the portions of pad guide 310 have width relationshipsother than those of the embodiment depicted in FIG. 3C. In someembodiments, each portion of plurality of pad guide 310 has a same widthalong direction Y.

Pad guide 310 includes one or more components or assemblies (not shown)at one or both ends configured to mechanically couple pad guide 310 toother components of a pad removal device such as pad removal device 100,discussed above with respect to FIGS. 1A-1E.

By the configuration described above, pad guide 310 is capable oftranslating the movement of first end 112 and second end 114 toward eachother in direction X into movement along direction Z such that thebenefits described above with respect to pad removal device 100 can berealized.

FIG. 4 is a schematic diagram of a telescoping arm 420, in accordancewith some embodiments. Telescoping arm 420 is usable as part or all ofactuator 120, discussed above with respect to pad removal device 100 andFIG. 1.

Telescoping arm 420 includes a first segment 422 and a second segment424. First segment 422 is configured to allow a range of portions ofsecond segment 424 to recede into first segment 422 such that an overalllength of telescoping arm is variable.

In some embodiments, an overall length of telescoping arm 420 is capableof being reduced or extended in response to a screw device. In someembodiments, an overall length of telescoping arm 420 is capable ofbeing reduced or extended in response to a pneumatic device.

In the embodiment depicted in FIG. 4, telescoping arm 420 has twosegments. In some embodiments, telescoping arm 420 has more than twosegments.

Telescoping arm 420 includes one or more components or assemblies (notshown) at one or both ends configured to mechanically couple telescopingarm 420 to other components of a pad removal device such as pad removaldevice 100, discussed above with respect to FIGS. 1A-1B.

By the configuration described above, telescoping arm 420 is capable ofactuating the movement of first end 112 and/or second end 114 of padguide 110 toward each other in direction X such that the benefitsdescribed above with respect to pad removal device 100 can be realized.

FIG. 5 is a schematic diagram of an actuating assembly 500, inaccordance with some embodiments. Actuating assembly 500 includes wire520 usable as part or all of actuator 120 and winding device 530 usableas part of control assembly 130, discussed above with respect to padremoval device 100 and FIGS. 1A-1E.

Wire 520 includes a metal or other similarly strong material and acoupling device 522 configured to mechanically couple wire 520 to a padguide such as pad guide 110, discussed above with respect to pad removaldevice 100 and FIGS. 1A-1E, pad guide 210, discussed above with respectto FIGS. 2A-2C, or pad guide 310, discussed above with respect to FIGS.3A-3C.

Winding device 530 includes one or more reels 532 configured to adjust,by rotation, a length of an extended portion of wire 520. In theembodiment depicted in FIG. 5, a single reel 532 is configured to adjustextended portions of two wires 520. In some embodiments, a single reel532 is configured to adjust an extended portion of a single wire 520. Insome embodiments, a single reel 532 is configured to adjust extendedportions of more than two wires 520.

In the embodiment depicted in FIG. 5, winding device 530 includes asingle reel 532. In some embodiments, winding device 530 includes reels(not shown) in addition to reel 532.

By the configuration described above, actuating assembly 500 is capableof actuating the movement of first end 112 and/or second end 114 of padguide 110 toward each other in direction X such that the benefitsdescribed above with respect to pad removal device 100 can be realized.

FIG. 6 is a schematic diagram of an actuating assembly 600, inaccordance with some embodiments. Actuating assembly 600 includesmoveable stages 620 usable as part or all of actuator 120 and trackingdevice 630 usable as part of control assembly 130, discussed above withrespect to pad removal device 100 and FIGS. 1A-1E.

Moveable stages 620 are mechanical components or assemblies configuredto be positioned by tracking device 630 while mechanically coupled to apad guide such as pad guide 110, discussed above with respect to padremoval device 100 and FIGS. 1A-1E, pad guide 210, discussed above withrespect to FIGS. 2A-2C, or pad guide 310, discussed above with respectto FIGS. 3A-3C.

In the embodiment depicted in FIG. 6, actuating assembly 600 includestwo moveable stages 620. In some embodiments, actuating assembly 600includes a single moveable stage 620. In some embodiments, actuatingassembly 600 includes more than two moveable stages 620.

By the configuration described above, actuating assembly 600 is capableof actuating the movement of first end 112 and/or second end 114 of padguide 110 toward each other in direction X such that the benefitsdescribed above with respect to pad removal device 100 can be realized.

FIG. 7 is a flowchart of a method 700 of removing a pad, in accordancewith one or more embodiments. In some embodiments, method 700 is amethod of removing a CMP pad from a surface of a platen. Method 700 isimplemented using a pad removal device such as pad removal device 100,discussed above with respect to FIGS. 1A-1E.

The sequence in which the operations of method 700 are depicted in FIG.7 is for illustration only; the operations of method 700 are capable ofbeing executed in sequences that differ from that depicted in FIG. 7. Insome embodiments, operations in addition to those depicted in FIG. 7 areperformed before, between and/or after the operations depicted in FIG.7.

At operation 710, a first end of a pad guide is affixed to a first padedge location on the pad, and a second end of the pad guide is affixedto a second pad edge location on the pad. In some embodiments, affixingfirst and second ends of a pad guide includes affixing first end 112 andsecond end 114 of pad guide 110, discussed above with respect to padremoval device 100 and FIGS. 1A-1E. In some embodiments, affixing firstand second ends of a pad guide includes affixing first and second endsof pad guide 210, discussed above with respect to FIGS. 2A-2C. In someembodiments, affixing first and second ends of a pad guide includesaffixing first and second ends of pad guide 310, discussed above withrespect to FIGS. 3A-3C.

In some embodiments, affixing first and second ends of a pad guideincludes affixing one or both of first or second ends using clippers. Insome embodiments, affixing first and second ends of a pad guide includesaffixing one or both of first or second ends using affixing component116, discussed above with respect to pad removal device 100 and FIGS.1A-1E.

In some embodiments, affixing first and second ends of a pad guideincludes affixing the first end to pad edge location 142 of pad 140 andthe second end to pad edge location 143 of pad 140, discussed above withrespect to FIGS. 1C-1E.

In some embodiments, operation 710 includes affixing a third end of thepad guide to a third pad edge location and affixing a fourth end of thesecond pad guide to a fourth pad edge location. In some embodiments,affixing third and fourth ends of the pad guide includes affixing thefirst end to pad edge location 144 of pad 140 and the second end to padedge location 145 of pad 140, discussed above with respect to FIG. 1D.

In some embodiments, operation 710 includes affixing a first end of asecond pad guide to a third pad edge location and affixing a second endof the second pad guide to a fourth pad edge location. In someembodiments, affixing first and second ends of a second pad guideincludes affixing the first end to pad edge location 146 of pad 140 andthe second end to pad edge location 147 of pad 140, discussed above withrespect to FIG. 1E.

At operation 720, the first end is pulled toward the second end using anactuator. The first end is pulled toward the second end along a firstdirection. In some embodiments, operation 720 includes pulling thesecond end toward the first end with another actuator.

In some embodiments, at least one of pulling the first end toward thesecond end or pulling the second end toward the first end includes usingactuator 120, discussed above with respect to pad removal device 100 andFIGS. 1A-1E. In some embodiments, at least one of pulling the first endtoward the second end or pulling the second end toward the first endincludes reducing a length of telescoping arm 420, discussed above withrespect to FIG. 4.

In some embodiments, at least one of pulling the first end toward thesecond end or pulling the second end toward the first end includes usingcontrol assembly 130, discussed above with respect to pad removal device100 and FIGS. 1A-1E. In some embodiments, at least one of pulling thefirst end toward the second end or pulling the second end toward thefirst end includes using wire 520 and winding device 530, discussedabove with respect to actuating assembly 500 and FIG. 5. In someembodiments, at least one of pulling the first end toward the second endor pulling the second end toward the first end includes using moveablestage 620 and tracking device 630, discussed above with respect toactuating assembly 600 and FIG. 6.

In some embodiments, at least one of pulling the first end toward thesecond end or pulling the second end toward the first end includespulling the first end toward the second end with a first actuator andpulling the second end toward the first end with a second actuator. Insome embodiments, at least one of pulling the first end toward thesecond end or pulling the second end toward the first end includes atleast one of pulling a third end toward a fourth end of the pad guide orpulling the fourth end toward the third end using at least oneadditional actuator. In some embodiments, at least one of pulling thefirst end toward the second end or pulling the second end toward thefirst end includes at least one of pulling a first end of a second padguide toward a second end of the second pad guide or pulling the secondend of the second pad guide toward the first end of the second pad guideusing at least one additional actuator.

In some embodiments, at least one of pulling the first end toward thesecond end or pulling the second end toward the first end includescontrolling a speed or speeds at which one or both of the first end ismoved toward the second end or the second end is moved toward the firstend. In some embodiments, at least one of pulling the first end towardthe second end or pulling the second end toward the first end includescontrolling a speed or speeds using a controller such as controller 802,discussed below with respect to system 800 and FIG. 8. Controlling thespeed or speeds at which one or both of the first end is moved towardthe second end or the second end is moved toward the first end controlsa speed or speed at which one or more pad edge locations are pulled awayfrom a surface, as discussed below. In some embodiments, pulling thefirst end and second end toward each other includes increasing the speedas a distance between the first end and the second end decreases.

In some embodiments, at least one of pulling the first end toward thesecond end or pulling the second end toward the first end includescontrolling the speed using a screw device. In some embodiments, atleast one of pulling the first end toward the second end or pulling thesecond end toward the first end includes controlling the speed using apneumatic controller. In some embodiments, at least one of pulling thefirst end toward the second end or pulling the second end toward thefirst end includes controlling the speed using a winding device. In someembodiments, at least one of pulling the first end toward the second endor pulling the second end toward the first end includes controlling thespeed using a tracking device.

In some embodiments, at least one of pulling the first end toward thesecond end or pulling the second end toward the first end includescontrolling the speed based on one or more predetermined speed values.In some embodiments, at least one of pulling the first end toward thesecond end or pulling the second end toward the first end includescontrolling the speed using one or more speed values based on userinput.

At operation 730, using the pad guide, in response to the at least oneof pulling the first end toward the second end or pulling the second endtoward the first end, each of the first pad edge location and the secondpad edge location is pulled in a second direction, also called a removaldirection, away from a pad center region. In some embodiments, thesecond direction is perpendicular to the first direction.

In some embodiments, using the pad guide to pull each of the first padedge location and the second pad edge location in the removal directionincludes using pad guide 110, discussed above with respect to padremoval device 100 and FIGS. 1A-1E.

In some embodiments, using the pad guide to pull each of the first padedge location and the second pad edge location in the removal directionincludes rotating a first segment of a plurality of plate segments abouta hinge relative to a second segment of the plurality of plate segments.In some embodiments, using the pad guide to pull each of the first padedge location and the second pad edge location in the removal directionincludes using pad guide 210, discussed above with respect to FIGS.2A-2C.

In some embodiments, using the pad guide to pull each of the first padedge location and the second pad edge location in the removal directionincludes bending an elastic plate. In some embodiments, using the padguide to pull each of the first pad edge location and the second padedge location in the removal direction includes using pad guide 310,discussed above with respect to FIGS. 3A-3C.

In some embodiments, pulling each of the first pad edge location and thesecond pad edge location in the removal direction away from the padcenter region includes pulling pad edge location 142 and pad edgelocation 143 away from pad center region 141 in direction Z, discussedabove with respect to FIGS. 1C-1E. In some embodiments, pulling each ofthe first pad edge location and the second pad edge location in theremoval direction away from the pad center region includes pulling padedge location 144 and pad edge location 145 away from pad center region141 in direction Z, discussed above with respect to FIG. 1D. In someembodiments, pulling each of the first pad edge location and the secondpad edge location in the removal direction away from the pad centerregion includes pulling pad edge location 146 and pad edge location 147away from pad center region 141 in direction Z, discussed above withrespect to FIG. 1E.

By controlling the speed or speeds at which at least one first end of atleast one pad guide is pulled toward at least one second end of the atleast one pad guide, a speed or speeds at which at least first andsecond pad edge locations are pulled away from a pad center region isalso controlled through the use of the pad guide. Method 700 therebyenables automated control of the forces applied to a pad during a padremoval process.

By executing the operation of method 700, the bonding strength between apad and a surface is therefore overcome more easily than with othermethods that do not include the operations of method 700. Method 700thereby facilitates the removal of a pad from a surface, for example theremoval of a CMP pad from the top surface of a platen. Compared to otherapproaches, method 700 enables easier and faster removal of a pad thatis bonded to a surface.

FIG. 8 a schematic view of a system 800 for controlling a pad removaldevice, in accordance with some embodiments. System 800 includes ahardware processor 802 and a non-transitory, computer readable storagemedium 804 encoded with, i.e., storing, the computer programinstructions 86, i.e., a set of executable instructions. Instructions806 include instructions for controlling a pad removal device. Theprocessor 802 is electrically coupled to the computer readable storagemedium 804 via a bus 808. The processor 802 is also electrically coupledto an I/O interface 810 by bus 808. A network interface 812 is alsoelectrically connected to the processor 802 via bus 808. Networkinterface 812 is connected to a network 814, so that processor 802 andcomputer readable storage medium 804 are capable of connecting toexternal elements via network 814. In some embodiments, at least one ofnetwork interface 812 or network 814 is a component of user interface132, discussed above with respect to pad removal device 100 and FIGS.1A-1E. The processor 802 is configured to execute the computer programinstructions 806 encoded in the computer readable storage medium 804 inorder to cause system 800 to be usable for performing a portion or allof the operations as described in method 700.

In some embodiments, the processor 802 is a central processing unit(CPU), a multi-processor, a distributed processing system, anapplication specific integrated circuit (ASIC), and/or a suitableprocessing unit.

In some embodiments, the computer readable storage medium 804 is anelectronic, magnetic, optical, electromagnetic, infrared, and/or asemiconductor system (or apparatus or device) for storing instructionsand/or data in a non-transitory manner. For example, the computerreadable storage medium 804 includes a semiconductor or solid-statememory, a magnetic tape, a removable computer diskette, a random accessmemory (RAM), a read-only memory (ROM), a rigid magnetic disk, and/or anoptical disk. In some embodiments using optical disks, the computerreadable storage medium 804 includes a compact disk-read only memory(CD-ROM), a compact disk-read/write (CD-R/W), and/or a digital videodisc (DVD).

In some embodiments, the storage medium 804 stores the computer programcode 806 configured to cause system 800 to perform a portion or all ofmethod 700. In some embodiments, the storage medium 804 also storesinformation needed for performing method 800 as well as informationgenerated during the performance of the method 800, such as speed values820, and/or a set of executable instructions to perform the operation ofmethod 700.

System 800 includes I/O interface 510. I/O interface 810 is coupled toexternal circuitry. In some embodiments, I/O interface 810 includes akeyboard, keypad, mouse, trackball, trackpad, and/or cursor directionkeys for communicating information and/or commands to processor 802. Insome embodiments, I/O interface 510 is a component of user interface132, discussed above with respect to pad removal device 100 and FIGS.1A-1E.

System 800 also includes network interface 812 coupled to the processor802. Network interface 812 allows system 800 to communicate with network814, to which one or more other computer systems are connected. Networkinterface 812 includes wireless network interfaces such as BLUETOOTH,WIFI, WIMAX, GPRS, or WCDMA; or wired network interface such asETHERNET, USB, or IEEE-1394. In some embodiments, method 700 isimplemented in two or more systems 800, and information such as speedvalues are exchanged between different systems 800 via network 814.

System 800 is configured to receive information related to pad removaloperations. The information is transferred to processor 802 via bus 808and is then stored in computer readable medium 804 as speed values 820.In some embodiments, the pad removal operations are accessed inoperation 730 (FIG. 7).

By being configured to execute a portion or all of method 700, system800 enables the realization of the advantages discussed above withrespect to pad removal device 100, method 700, and FIGS. 1A-1E and 7.

One aspect of this description relates to a pad removal device. The padremoval device includes a pad guide extending along a first direction.The pad guide includes a first affixing component configured to affix afirst end of the pad guide to a pad at a first pad edge location, and asecond affixing component configured to affix a second end of the padguide to the pad at a second pad edge location opposite the first padedge location. The pad removal device further includes an actuatorattached to the pad guide and a control assembly coupled to theactuator, the control assembly configured to cause the actuator to movethe first end toward the second end along the first direction. The padguide is configured to extend in a second direction different from thefirst direction by an amount dependent on a distance between the firstend and the second end. In some embodiments, the second direction isperpendicular to the first direction. In some embodiments, the pad guidecomprises a plurality of plate segments joined by hinges. In someembodiments, each endmost segment of the plurality of plate segments hasa width less than a width of at least one inner segment of the pluralityof plate segments. In some embodiments, a middle segment of theplurality of plate segments has a width wider than other segments of theplurality of plate segments. In some embodiments, each segment of theplurality of plate segments has a same width. In some embodiments, thepad guide includes a single elastic plate. In some embodiments, at leastone of the first affixing component or the second affixing componentincludes a clipper, a hook, or a needle. In some embodiments, the firstaffixing component is configured to affix the first end of the pad guideto opposite sides of the pad at the first pad edge location, and thesecond affixing component is configured to affix the second end of thepad guide to opposite sides of the pad at the second pad edge location.In some embodiments, the actuator includes a first telescoping armattached to the first end of the pad guide and a second telescoping armattached to the second end of the pad guide. In some embodiments, theactuator includes a wire attached to the first end and the second end ofthe pad guide, and the control assembly comprises a winding deviceconfigured to adjust a length of the wire.

Another aspect of this description relates to a pad removal device. Thepad guide includes a first end configured to affix to a pad at a firstpad edge location, a second end configured to affix to the pad at asecond pad edge location, a third end configured to affix to the pad ata third pad edge location, and a fourth end configured to affix to thepad at a fourth pad edge location. The pad removal device furtherincludes a plurality of actuators. Each actuator of the plurality ofactuators is attached to a corresponding one of the first end, thesecond end, the third end, and the fourth end of the pad guide. In someembodiments, the plurality of actuators includes a first actuatorattached to the first end of the pad guide, a second actuator attachedto the second end of the pad guide, a third actuator attached to thethird end of the pad guide, and a fourth actuator attached to the fourthend of the pad guide. In some embodiments, the second pad edge locationis opposite the first pad edge location, and the fourth pad edgelocation is opposite the third pad edge location. In some embodiments,the pad removal device further includes a first affixing componentconfigured to affix the first end of the pad guide to opposite sides ofpad at the first pad edge location, a second affixing componentconfigured to affix the second end of the pad guide to opposite sides ofthe pad at the second pad edge location, a third affixing componentconfigured to affix the third end of the pad guide to opposite sides ofthe pad at the third pad edge location, and a fourth affixing componentconfigured to affix the fourth end of the pad guide to opposite sides ofthe pad at the fourth pad edge location. In some embodiments, the padremoval device further includes a control assembly coupled to theplurality of actuators. The control assembly is configured to cause atleast one actuator of the plurality of actuators to move the first endof the pad guide toward the second end of the pad guide along a firstdirection, and cause at least another actuator of the plurality ofactuators to move the third end of the pad guide toward the fourth endof the pad guide along a second direction different from the firstdirection. In some embodiments, the second direction is perpendicular tothe first direction.

Still another aspect of this description relates to a pad removaldevice. The pad removal device includes a pad guide having a first endconfigured to affix to a pad at opposite sides of the pad at a first padedge location, a second end configured to affix to the pad at oppositesides of the pad at a second pad edge location, a third end configuredto affix to the pad at opposite sides of the pad at a third pad edgelocation, and a fourth end configured to affix to the pad at oppositesides of the pad at a fourth pad edge location. The pad removal devicefurther includes at least one first actuator attached to the first andsecond ends of the pad guide, at least one second actuator attached tothe third and fourth ends of the pad guide, and a control assemblycoupled to the at least one first actuator and the at least one secondactuator. The control assembly is configured to cause the at least onefirst actuator to move the first end of the pad guide toward the secondend of the pad guide along a first direction, and cause the at least onesecond actuator to move the third end of the pad guide toward the fourthend of the pad guide along a second direction different from the firstdirection. In some embodiments, the second direction is perpendicular tothe first direction. In some embodiments, the control assembly isconfigured to control a speed at which the at least one first actuatormoves the first end toward the second end, and to control a speed atwhich the at least one second actuator moves the third end toward thefourth end.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A pad removal device comprising: a pad guideextending along a first direction, wherein the pad guide comprises: afirst affixing component configured to affix a first end of the padguide to a pad at a first pad edge location, and a second affixingcomponent configured to affix a second end of the pad guide to the padat a second pad edge location opposite the first pad edge location; anactuator attached to the pad guide; and a control assembly coupled tothe actuator, the control assembly configured to cause the actuator tomove the first end toward the second end along the first direction,wherein the pad guide is configured to extend in a second directiondifferent from the first direction by an amount dependent on a distancebetween the first end and the second end.
 2. The pad removal device ofclaim 1, wherein the second direction is perpendicular to the firstdirection.
 3. The pad removal device of claim 1, wherein the pad guidecomprises a plurality of plate segments joined by hinges.
 4. The padremoval device of claim 3, wherein each endmost segment of the pluralityof plate segments has a width less than a width of at least one innersegment of the plurality of plate segments.
 5. The pad removal device ofclaim 3, wherein a middle segment of the plurality of plate segments hasa width wider than other segments of the plurality of plate segments. 6.The pad removal device of claim 3, wherein each segment of the pluralityof plate segments has a same width.
 7. The pad removal device of claim1, wherein the pad guide comprises a single elastic plate.
 8. The padremoval device of claim 1, wherein at least one of the first affixingcomponent or the second affixing component comprises a clipper, a hook,or a needle.
 9. The pad removal device of claim 1, wherein the firstaffixing component is configured to affix the first end of the pad guideto opposite sides of the pad at the first pad edge location, and thesecond affixing component is configured to affix the second end of thepad guide to opposite sides of the pad at the second pad edge location.10. The pad removal device of claim 1, wherein the actuator comprises afirst telescoping arm attached to the first end of the pad guide and asecond telescoping arm attached to the second end of the pad guide. 11.The pad removal device of claim 1, wherein the actuator comprises a wireattached to the first end and the second end of the pad guide, and thecontrol assembly comprises a winding device configured to adjust alength of the wire.
 12. A pad removal device comprising: a pad guide,wherein the pad guide comprises: a first end configured to affix to apad at a first pad edge location, a second end configured to affix tothe pad at a second pad edge location, a third end configured to affixto the pad at a third pad edge location, and a fourth end configured toaffix to the pad at a fourth pad edge location; and a plurality ofactuators, wherein each actuator of the plurality of actuators isattached to a corresponding one of the first end, the second end, thethird end, and the fourth end of the pad guide.
 13. The pad removaldevice of claim 12, wherein the plurality of actuators comprises a firstactuator attached to the first end of the pad guide, a second actuatorattached to the second end of the pad guide, a third actuator attachedto the third end of the pad guide, and a fourth actuator attached to thefourth end of the pad guide.
 14. The pad removal device of claim 12,wherein the second pad edge location is opposite the first pad edgelocation, and the fourth pad edge location is opposite the third padedge location.
 15. The pad removal device of claim 12, furthercomprising: a first affixing component configured to affix the first endof the pad guide to opposite sides of pad at the first pad edgelocation, a second affixing component configured to affix the second endof the pad guide to opposite sides of the pad at the second pad edgelocation, a third affixing component configured to affix the third endof the pad guide to opposite sides of the pad at the third pad edgelocation, and a fourth affixing component configured to affix the fourthend of the pad guide to opposite sides of the pad at the fourth pad edgelocation.
 16. The pad removal device of claim 12, further comprising: acontrol assembly coupled to the plurality of actuators, wherein thecontrol assembly is configured to cause at least one actuator of theplurality of actuators to move the first end of the pad guide toward thesecond end of the pad guide along a first direction, and cause at leastanother actuator of the plurality of actuators to move the third end ofthe pad guide toward the fourth end of the pad guide along a seconddirection different from the first direction.
 17. The pad removal deviceof claim 16, wherein the second direction is perpendicular to the firstdirection.
 18. A pad removal device, comprising: a pad guide, whereinthe pad guide comprises: a first end configured to affix to a pad atopposite sides of the pad at a first pad edge location, a second endconfigured to affix to the pad at opposite sides of the pad at a secondpad edge location, a third end configured to affix to the pad atopposite sides of the pad at a third pad edge location, and a fourth endconfigured to affix to the pad at opposite sides of the pad at a fourthpad edge location; at least one first actuator attached to the first andsecond ends of the pad guide; at least one second actuator attached tothe third and fourth ends of the pad guide; and a control assemblycoupled to the at least one first actuator and the at least one secondactuator, wherein the control assembly is configured to cause the atleast one first actuator to move the first end of the pad guide towardthe second end of the pad guide along a first direction, and cause theat least one second actuator to move the third end of the pad guidetoward the fourth end of the pad guide along a second directiondifferent from the first direction.
 19. The pad removal device of claim18, wherein the second direction is perpendicular to the firstdirection.
 20. The pad removal device of claim 18, wherein the controlassembly is configured to control a speed at which the at least onefirst actuator moves the first end toward the second end, and to controla speed at which the at least one second actuator moves the third endtoward the fourth end.